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AP Series Air Suspension Vibration Isolators

APPLICATIONS:
● Semiconductor fabrication and wafer inspection
● LCD manufacture and inspection
● Electron Microscopy
● Optical Inspection
● SEMs/TEMs
● Other Precision equipments
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AP-80

Dimensions(mm): 170x170x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  170x170x185
     Weight(Kg) /1pc  10.5
     Max Loading(kg)(4pcs/set)  560
     Screw hole pitch(mm)  150x150
     Screw hole Diameter(mm)  10
     Air pressure requirement  0.40~0.70MPa

     

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AP-100

"Dimensions(mm): 180x180 x185"

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  180x180x185
     Weight(Kg) /1pc  14
     Max Loading(kg)(4pcs/set)  880
     Screw hole pitch(mm)  160x160
     Screw hole Diameter(mm)  10
     Air pressure requirement  0.40~0.70MPa

     

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AP-120

Dimensions(mm): 200x200x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  200x200x185
     Weight(Kg) /1pc  15
     Max Loading(kg)(4pcs/set)  1200
     Screw hole pitch(mm)  176x176
     Screw hole Diameter(mm)  10
     Air pressure requirement  0.40~0.70MPa

     

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AP-140

Dimensions(mm): 210x2170x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  210x210x185
     Weight(Kg) /1pc  19
     Max Loading(kg)(4pcs/set)  1700
     Screw hole pitch(mm)  186x186
     Screw hole Diameter(mm)  10
     Air pressure requirement  0.40~0.70MPa

     

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AP-160

Dimensions(mm): 240x240x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  240x240x185
     Weight(Kg) /1pc  21
     Max Loading(kg)(4pcs/set)  2200
     Screw hole pitch(mm)  210x210
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-180

Dimensions(mm): 250x250x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  250x250x185
     Weight(Kg) /1pc  27.5
     Max Loading(kg)(4pcs/set)  2800
     Screw hole pitch(mm)  230x230
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-200

Dimensions(mm): 260x260x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  260x260x185
     Weight(Kg) /1pc  32
     Max Loading(kg)(4pcs/set)  3600
     Screw hole pitch(mm)  230x230
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-230

Dimensions(mm): 300x300x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  300x300x185
     Weight(Kg) /1pc  43.5
     Max Loading(kg)(4pcs/set)  4600
     Screw hole pitch(mm)  270x270
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-270

Dimensions(mm): 320x320x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  380x380x185
     Weight(Kg) /1pc  52
     Max Loading(kg)(4pcs/set)  6400
     Screw hole pitch(mm)  290x290
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-330

Dimensions(mm): 370x370x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  410x410x185
     Weight(Kg) /1pc  67.5
     Max Loading(kg)(4pcs/set)  9600
     Screw hole pitch(mm)  340x340
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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AP-380

Dimensions(mm): 430x430x185

  •  Natural frequency  Vertical / Horizontal: 2.5~3.0Hz
     Vibration isolation method  Air spring
     Damping method  Air damping using orifices
     Leveling method  Automatic levelers keep the surface table level automatically
     (graduation ± 200μm)
     Size(WxDxH mm)  430x430x185
     Weight(Kg) /1pc  90
     Max Loading(kg)(4pcs/set)  13000
     Screw hole pitch(mm)  400x400
     Screw hole Diameter(mm)  13
     Air pressure requirement  0.40~0.70MPa

     

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